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KE Furnace DD-853V, PYRO process
K.E_853V_J2__PYRO Spec. Report.pdf
K.E_853V_J2_PYRO__시험성적서.pdf
1. serial No : T2DD3-16066-1
2. Vintage :
3. wafer size : 8
4. Condition : Completely refurbishemnt
5. Location : CND clean room
*Refer to attached file for detail
